A position-sensitive detector mounted on an inner-shell electron energy-loss spectrometer

An inner-shell electron energy-loss spectrometer has been equipped with a position-sensitive multi-detector system consisting of two microchannel plate intensifiers, a phosphor screen and a charge-coupled device. This has led to a strong improvement in the data collection time which generally is fairly large for inner-shell transitions as the excitation cross sections are much smaller than those for valence-shell transitions. The SF₆ electron energy-loss spectrum recorded at the S 2p edge with an energy resolution of 200 meV is given as an example.