Advances in correlative microscopy integrating optical, X-ray/CT, and SEM technologies

Jeffrey A. Bourque; David Edwards

Advances in correlative microscopy integrating optical, X-ray/CT, and SEM technologies

Jeffrey A. Bourque
, David Edwards

Nikon Metrology, Inc.
JEOL Ltd.

Research output: Contribution to journal › Article › peer-review

Abstract

The investigation of high-density surface-mount devices has been made easier with new techniques and equipment that allow an individual to correlate findings from one instrument to another; from optical to X-ray and CT to SEM. Add to that improved ease of use and automation and the individual can focus on being an investigator rather than an instrument or process specialist.

Original language	English
Pages (from-to)	88-92
Number of pages	5
Journal	SMT Surface Mount Technology Magazine
Volume	27
Issue number	3
State	Published - Mar 2012
Externally published	Yes

Cite this

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abstract = "The investigation of high-density surface-mount devices has been made easier with new techniques and equipment that allow an individual to correlate findings from one instrument to another; from optical to X-ray and CT to SEM. Add to that improved ease of use and automation and the individual can focus on being an investigator rather than an instrument or process specialist.",

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AB - The investigation of high-density surface-mount devices has been made easier with new techniques and equipment that allow an individual to correlate findings from one instrument to another; from optical to X-ray and CT to SEM. Add to that improved ease of use and automation and the individual can focus on being an investigator rather than an instrument or process specialist.

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Advances in correlative microscopy integrating optical, X-ray/CT, and SEM technologies

Abstract

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