Interferometric methods for assessment of toroidal diffraction grating performance

Phillip C. Baker; Paolo Bergamini; Tom Berger; J. G. Timothy

doi:10.1117/12.140578

Interferometric methods for assessment of toroidal diffraction grating performance

Phillip C. Baker
, Paolo Bergamini
, Tom Berger
, J. G. Timothy

Baker Consulting
Stanford University

Research output: Contribution to journal › Conference article › peer-review

Abstract

The measurement of the shape and optical performance of toroidal mirrors has always presented a challenge to the manufacturer and user of these types of optical elements.This report presents a technique for evaluating the complex shape and optical performance of long radius toroidal mirrors that are to be used in the EUV. The measurement techniques will be discussed and examples given. Interferometric analysis will be presented. Performance spot diagrams and MTF analysis will be discussed. Manufacturing techniques will be evaluated with respect to the application of more definitive measurement technology.

Original language	English
Pages (from-to)	453-463
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1742
DOIs	https://doi.org/10.1117/12.140578
State	Published - Jan 21 1993
Externally published	Yes
Event	Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography 1992 - San Diego, United States Duration: Jul 22 1992 → …

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abstract = "The measurement of the shape and optical performance of toroidal mirrors has always presented a challenge to the manufacturer and user of these types of optical elements.This report presents a technique for evaluating the complex shape and optical performance of long radius toroidal mirrors that are to be used in the EUV. The measurement techniques will be discussed and examples given. Interferometric analysis will be presented. Performance spot diagrams and MTF analysis will be discussed. Manufacturing techniques will be evaluated with respect to the application of more definitive measurement technology.",

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AU - Bergamini, Paolo

AU - Berger, Tom

AU - Timothy, J. G.

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Y1 - 1993/1/21

N2 - The measurement of the shape and optical performance of toroidal mirrors has always presented a challenge to the manufacturer and user of these types of optical elements.This report presents a technique for evaluating the complex shape and optical performance of long radius toroidal mirrors that are to be used in the EUV. The measurement techniques will be discussed and examples given. Interferometric analysis will be presented. Performance spot diagrams and MTF analysis will be discussed. Manufacturing techniques will be evaluated with respect to the application of more definitive measurement technology.

AB - The measurement of the shape and optical performance of toroidal mirrors has always presented a challenge to the manufacturer and user of these types of optical elements.This report presents a technique for evaluating the complex shape and optical performance of long radius toroidal mirrors that are to be used in the EUV. The measurement techniques will be discussed and examples given. Interferometric analysis will be presented. Performance spot diagrams and MTF analysis will be discussed. Manufacturing techniques will be evaluated with respect to the application of more definitive measurement technology.

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DO - 10.1117/12.140578

M3 - Conference article

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SN - 0277-786X

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography 1992

Y2 - 22 July 1992

ER -

Interferometric methods for assessment of toroidal diffraction grating performance

Abstract

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